Vacuum valve
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United States of America Patent
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-
Jul 29, 1997
Grant Date -
N/A
app pub date -
Apr 28, 1995
filing date -
May 9, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum valve has a valve stem with a magnetic drive for moving the valve stem in the opening direction of the valve. A piston configuration is connected to the valve stem and is enclosed within a double-cylinder configuration. Overflow or inflow/outflow lines connected between the two chambers of the double-cylinder configuration, contain flow conductance value setting elements such as valves or filters, for setting a damping effect on movement of the piston configuration, thus damping movement of the valve stem.
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