Ceramic mirrors
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United States of America Patent
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Jul 22, 1997
Issued Date -
N/A
app pub date -
Jan 25, 1996
filing date -
Oct 2, 1991
priority date (Note) -
Expired
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Abstract
A ceramic mirror having a surface flatness of no more than 1 .mu.m and/or a centerline average height of no more than 1 nm as measured by the laser interference method, is made from a titanium oxide powder having an average particle diameter of 0.5 .mu.m and a minimum purity of 99.8% by weight. The mirror also has a maximum amount of irregular reflection of incident light not exceeding 5% when the angle of projection is between 0.degree. and 90.degree. as measured by a colorimeter and is made by the process including forming a titanium oxide powder having a maximum average particle diameter of 0.5 .mu.m and a minimum purity of 99.8 wt. %, compacting the titanium oxide powder by cold isostatic pressing to produce a compact, sintering the compact of titanium oxide powder in air at a temperature of 1000.degree. C.-1300.degree. C. to produce a ceramic body, hot isostatic pressing the ceramic body after the sintering in an inert atmosphere at 800.degree. C.-1500.degree. C. under a minimum pressure of 500 kg/cm.sup.2, and machining the sintered body by surface grinding and lapping.
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