Field emission cold cathode element having exposed substrate
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United States of America Patent
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Jul 15, 1997
Issued Date -
N/A
app pub date -
Jun 2, 1995
filing date -
Apr 13, 1993
priority date (Note) -
Expired
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Abstract
A field emission cold cathode element having a conducting substrate, a dielectric layer which is on the substrate and has holes, emitter electrodes which have a sharp-pointed tip and stand on the substrate in the respective holes in the dielectric layer, and a gate electrode which is on the dielectric layer and has apertures right above the respective holes in the dielectric layer. The tip of each emitter electrode is near or in the aperture in the gate electrode layer. The dielectric layer is largely removed so as to remain only in limited regions around the holes for the respective emitter electrodes, and a gate electrode layer is formed with, in addition to the apertures for the emitter electrodes, a number of holes in regions where the substrate surface is exposed by removal of the dielectric layer. The partial removal of the dielectric and gate electrode layers has the effect of reducing interlayer stresses induced by temperature changes, so that the gate electrode layer can be made desirably thick.
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