Dry resist
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United States of America Patent
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Jul 15, 1997
Grant Date -
N/A
app pub date -
Jun 12, 1995
filing date -
Jun 14, 1994
priority date (Note) -
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Abstract
The disclosure describes a dry resist comprising: a biaxially oriented laminated polyester film whose surface layer on at least one side contains particles having an average particle diameter of 0.01 to 3.0 .mu.m, and has a center line average roughness of not less than 0.005 .mu.m and a maximum height of less than 1.5 .mu.m, and which has a haze of not more than 1.5%; a photoresist layer formed on said biaxially oriented laminated polyester film; and a protective film formed on said photoresist layer.
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