Method for producing a microsystem and forming a microsystem laser therefrom
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United States of America Patent
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Jun 10, 1997
Issued Date -
N/A
app pub date -
Apr 7, 1995
filing date -
Apr 9, 1992
priority date (Note) -
Expired
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Abstract
The invention relates to a method for producing a microsystem and from it forming a microsystem laser, which preferably has a vertical structural element by contacting of wafer plates, which carry different functional elements of a system, so that this system on the one hand thus includes heterogeneous functions such as actuators, optics, sensors, cooling systems, micromechanics and electronics, and on the other hand, the wafer carrying these functions permits a relatively homogeneous processing of quite similar functions integrated each on one wafer, so that the complexity of the system is created for the first time for the vertical arrangement of these functions.
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