Device for transferring a transport object between two end positions
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United States of America Patent
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Jun 10, 1997
Grant Date -
N/A
app pub date -
Mar 1, 1995
filing date -
Aug 31, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.
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