Coupling for multiple masses in a micromachined device
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United States of America Patent
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Jun 3, 1997
Grant Date -
N/A
app pub date -
Jun 6, 1995
filing date -
Jun 6, 1995
priority date (Note) -
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Abstract
A micromachined device has two suspended masses positioned near each other, each of the masses being dithered along a dither axis. Two couplings, each including an arcuate member and an anchored support beam, are provided between the masses to allow relative anti-phase movement and to resist relative in-phase movement. The coupling extends around a region intermediate the masses where a dither detection device is disposed.
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