Ceramic susceptor with embedded metal electrode and eutectic connection
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United States of America Patent
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May 27, 1997
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N/A
app pub date -
Jul 14, 1995
filing date -
Jul 14, 1995
priority date (Note) -
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Abstract
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
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