Liquid material-vaporizing and supplying apparatus
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United States of America Patent
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May 20, 1997
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N/A
app pub date -
Feb 13, 1995
filing date -
Feb 20, 1994
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Abstract
A liquid flow meter is connected in series with a vaporizer having a vaporizing function and a flow rate-adjusting function and vaporizing a liquid material supplied through said liquid flow meter to compare a flow rate detected by the liquid flow meter with a set value, whereby controlling a quantity of liquid material introduced into a vaporizing chamber provided in said vaporizer on the basis of this comparison result, and thus a flow rate of vaporized gas can be always stably controlled in high-speed response.
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