Interferometric method for optically testing an object with an aspherical surface
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United States of America Patent
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Apr 29, 1997
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N/A
app pub date -
May 24, 1995
filing date -
May 24, 1995
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Abstract
A method for testing an object with an aspherical surface. Based on the theory that an aspherical surface is composed of a plurality of spherical surfaces with different radii, the method tests the profile of said aspherical object by positioning the focus of an interferometer on the curvature centers of the plurality of spherical surfaces, recording the relative displacement of the aspherical object and the referenced spherical surfaces and calculating the aberrations therebetween.
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