Resonance contact scanning force microscope
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United States of America Patent
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Apr 29, 1997
Issued Date -
N/A
app pub date -
Jul 11, 1995
filing date -
Apr 28, 1993
priority date (Note) -
Expired
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Abstract
The resonance contact scanning force microscope includes a reflective cantilever arm which is oscillated at a high harmonic of the resonance frequency of the cantilever arm, while the probe tip is maintained in substantially constant contact with the surface of the specimen. The motion of the free end of the cantilever arm is measured, to generate a deflection signal indicative of the amount of actual deflection of the probe tip. The method and apparatus permit high speed scans and real time imaging of the surface of a specimen with a substantial reduction in noise normally arising due to tip-surface interaction and acoustic noise.
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