Metal ion reduction in top anti-reflective coatings for photoresisis
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United States of America Patent
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Apr 29, 1997
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app pub date -
Jun 2, 1995
filing date -
Jul 10, 1992
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Abstract
The present invention provides methods for producing top anti-reflective coating compositions having a very low level of metal ions, utilizing specially treated ion exchange resins. A method is also provided for producing semiconductor devices using such top anti-reflective coating compositions.
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