Neutralizing apparatus for charged body
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United States of America Patent
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-
Apr 15, 1997
Grant Date -
N/A
app pub date -
Feb 24, 1993
filing date -
Aug 31, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A neutralizing apparatus is provided to facilitate and efficiently implement electric charge removal from a charged body such as a wafer which is easily charged. When the easily charged body such as a wafer is transported in a housing, a neutralizing charge generator, typically light sources for projecting exciting ultraviolet rays into the housing, are operated. Accordingly, the housing is filled with ions and a gas such as non-reactive gas. The neutralizing charge generator can generate positive or negative ions and electrons. When the charged body is positively charged, the electrons or negative ions move toward the charged body to neutralize the charged body with positive charge. When the charged body is negatively charged, positive ions move toward the charged body to neutralize the negative charge.
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