Method and device for unidirectional airflow in cleanroom
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United States of America Patent
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Apr 15, 1997
Issued Date -
N/A
app pub date -
Jun 6, 1995
filing date -
Mar 22, 1994
priority date (Note) -
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status (Latency Note)
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Abstract
A ceiling structure within a cleanroom, including an array of cleanroom filters supported in openings of a grid support structure, wherein the ceiling structure includes a gel track coupled either at the top of the grid support channel. The cleanroom filters including a peripheral flange are suspended in the ceiling structure by having a ceiling edge of the peripheral flange either immersed in the gel track at the top of the grid support structure or using a cleanroom filter having gel or the lower knife edge seal thereof engaging a portion of the top of the grid support channel. Filtered air passes through the channel structure into the vortex region to reduce the vortex region or dead air space below the channel as well as prevent the accumulation of particulate material in the interior of the channel. A damper may be provided with the grid support structure to control the flow of filtered air into the interior of the grid support structure.
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