Sputtering shield
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United States of America Patent
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Mar 25, 1997
Grant Date -
N/A
app pub date -
Jun 28, 1995
filing date -
Jun 28, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A shield for use in a sputtering system. The shield includes a support having an inner expanse defining a two-dimensional array of cavities. The cavities are formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse. The shield minimizes the tendency of material deposited on the shield surface, such as sputtered carbon material, from flaking off during a sputtering operation. Also disclosed is a sputtering assembly that employs the shield.
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