Cleaning apparatus
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United States of America Patent
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-
Mar 4, 1997
Grant Date -
N/A
app pub date -
Apr 27, 1995
filing date -
Mar 16, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The cleaning apparatus of the present invention is composed of a cleaning chamber 1 of vacuum-tight structure in which a work W to be cleaned is contained, an organic solvent vapor generating tank 4 communicated with the cleaning chamber 1 via piping, and a vacuum pump 6 for evacuating the cleaning chamber 1. A heat exchange member 3 through which a cooling medium passes is provided upside in the cleaning chamber 1. After the cleaning chamber 1 is reduced in pressure, the cooling medium is supplied into the heat exchange member 3 while organic solvent vapor is introduced from the vapor generating tank 4 into the cleaning chamber 1. Thus, a cleaning process is executed in combination of vapor cleaning by the vapor condensing on the surface of a work W and shower cleaning by the vapor being liquefied by the heat exchange member 3 and dropping onto the work W.
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