Anode assembly for generating x-rays and instrument with such anode assembly

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United States of America Patent

PATENT NO 5602899
SERIAL NO

08593308

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Abstract

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An anode assembly for generating x-rays has a mounting block with a channel therethrough, with a diamond wafer mounted sealingly across an opening in the block so as to have an inner surface in contact with the coolant flowing in the channel. Alternatively, a thicker diamond member is mounted in the block with thermal conduction through the metal block. A metal anode film bonded to the outer surface of the diamond is receptive of a focused electron beam to generate x-rays. The diamond provides cooling in compensation for the film being heated by the electron beam. The assembly is useful in a scanning x-ray monochromator instrument for chemical analysis of a specimen surface.

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Patent Owner(s)

Patent OwnerAddress
NOVA MEASURING INSTRUMENTS INC3090 OAKMEAD VILLAGE DRIVE SANTA CLARA CA 95051

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Larson, Paul E Bloomington, MN 13 380

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