Microwave enhanced CVD method for coating plastic with carbon films
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United States of America Patent
Stats
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Feb 11, 1997
Issued Date -
N/A
app pub date -
Sep 28, 1994
filing date -
Feb 10, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microwave enhanced chemical vapor deposition method is provided for coating plastic articles with crystalline carbon films. First, a reactive gas including hydrogen gas and a carbon containing raw material gas is introduced into a reaction chamber. Next, a magnetic field is established in the reaction chamber. Microwaves are next introduced into the chamber to create a cyclotron resonance in order to form a plasma of carbon and hydrogen containing gas. The carbon containing plasma deposits a coating of a crystalline and amorphous carbon on a substrate placed within the reaction chamber, while the hydrogen plasma simultaneously etches away the amorphous carbon, thereby leaving only crystalline carbon. The method is particularly adapted for the deposition of crystalline carbon films on plastic materials, as the substrate is not required to be heated in order to receive a layer of crystalline carbon.
First Claim
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