Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer
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United States of America Patent
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Feb 4, 1997
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app pub date -
Jun 7, 1995
filing date -
Jun 29, 1990
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Abstract
A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an important consideration for bright, high-density displays such as are used in high-definition television applications.
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