Shower head and film forming apparatus using the same
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United States of America Patent
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Jan 21, 1997
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N/A
app pub date -
Apr 18, 1996
filing date -
Apr 20, 1995
priority date (Note) -
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Abstract
A shower head of a metal CVD apparatus has a raw gas passage and a reduction gas passage for independently and respectively supplying a raw gas and a reduction gas into a process chamber. The shower head includes upper, middle and lower blocks which are formed independently of each other. Each of the raw gas passage and the reduction gas passage is branched from the upper block to the lower block. A coolant passage is formed in the lower block near supply outlets of the raw gas and the reduction gas for cooling the supply outlets. A heater is arranged in the upper and middle blocks for heating the raw gas passage.
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