Laser machining of a workpiece through adjacent mask by optical elements creating parallel beams
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United States of America Patent
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Dec 17, 1996
Grant Date -
N/A
app pub date -
Mar 10, 1995
filing date -
Mar 10, 1995
priority date (Note) -
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Abstract
A laser machining system employs a perforated proximity mask placed on or near a generally planar workpiece surface. Holes in the mask define a pattern of holes in the workpiece or marks on its surface to be formed by laser beam pulses passing through the mask. The beam is indexed from hole to hole or between groups of holes in the mask, between the pulses (or groups of pulses) of the laser. This indexing can be carried out by a pair of rotatable mirrors that direct the beam to a series of different holes in the mask via an optical element, e.g. a concave mirror or a telecentric lens assembly. This optical element converts the beams received from the indexing mirrors to a series of parallel beams that are directed to strike the mask and hence the workpiece generally normal to the workpiece surface. The optical element also serves the purpose of focusing each beam.
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