Micro-sensor thin-film anemometer
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United States of America Patent
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Nov 19, 1996
Grant Date -
N/A
app pub date -
Nov 21, 1994
filing date -
Nov 21, 1994
priority date (Note) -
Expired
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Abstract
A device for measuring turbulence in high-speed flows is provided which includes a micro-sensor thin-film probe. The probe is formed from a single crystal of aluminum oxide having a 14.degree. half-wedge shaped portion. The tip of the half-wedge is rounded and has a thin-film sensor attached along the stagnation line. The bottom surface of the half-wedge is tilted upward to relieve shock induced disturbances created by the curved tip of the half-wedge. The sensor is applied using a microphotolithography technique.
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