Laser system with a micro-mechanically moved mirror

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United States of America Patent

PATENT NO 5572543
SERIAL NO

08318665

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Abstract

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The invention provides a laser system with one or several micro-mechnically produced, actively controlled laser mirrors which are provided with an actuation device, so that the rapid manipulation of small laser mirrors is assured. The mirrors are designed so that they permit an economical production in large numbers.

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Patent Owner(s)

Patent OwnerAddress
DEUTSCHE AEROSPACE AGPATENTABTEILUNG ROBERT-KOCH-STRASSE D-8012 OTTOBRUNN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heinemann, Stefan Munich, DE 46 303
Kroy, Walter Ottobrunn, DE 7 329
Mehnert, Axel Schongau, DE 20 128
Peuser, Peter Riemerling, DE 11 148
Schmitt, Nikolaus P Munich, DE 1 41
Seidel, Helmut Starnberg, DE 20 627

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