Dielectric micromechanical element

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United States of America Patent

PATENT NO 5572076
SERIAL NO

07730914

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A dielectric micromechanical element the moveable component of which (hereinafter referred to as rotor) is an electrically homogeneous or inhomogeneous dielectric. The rotor is driven via one or more electric field vectors which are generated via electrode arrangements by switched voltages and/or by triggering the electrodes with phase-shifted voltages. On at least one side of the rotor and/or inside the rotor the electrodes form a linear or curved row of electrodes.

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Patent Owner(s)

Patent OwnerAddress
FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E V80686 MÜNCHEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Benecke, Wolfgang Berlin, DE 16 592
Fuhr, Gunter Berlin, DE 37 991
Gimsa, Jan Berlin, DE 7 75
Glaser, Roland Berlin, DE 5 9
Hagedorn, Rolf Berlin, DE 24 931
Wagner, Bernhard Berlin, DE 44 273

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  • 5 Citation Count
  • H02K Class
  • 2.82 % this patent is cited more than
  • 29 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges9170832616743101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 800102030405060708090100110120130140150160170180

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