Probe holder and probe mounting method for a scanning probe microscope
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United States of America Patent
Stats
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Oct 29, 1996
Grant Date -
N/A
app pub date -
Mar 17, 1995
filing date -
Mar 17, 1995
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A probe holder non-rotatingly mountable in a support bracket releasibly receives a scanning microscope probe. Guide rods extend outward from the probe holder on the scan head and engage bores formed in the other of the probe holder and the scan head during closure of the scan head with the probe holder to co-axially align the probe with a probe receiver in the scan head. Transversely extending arms on a spindle attached to a scan head slide along ramp surfaces in the scan head to a fixed stop to rotationally position the scan head. Complementary surfaces on the spindle and a stationarily affixed sleeve co-axially center the scan head with the scan head support structure and the probe holder. A method of co-axially and rotationally aligning a probe for exchange between a scan head and a probe holder is disclosed using the guide rods and guide bores, the spindle arms, ramp and stop surfaces and the complementary surfaces on the spindle and the stationary sleeve, and a non-rotatable probe holder mount. The alignment structure and method are also applied to a sample holder.

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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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RHK TECHNOLOGY INC | 1050 EAST MAPLE ROAD TROY MI 48083 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Wang, Zhouhang | Pontiac, MI | 2 | 14 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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