Detector apparatus of desorption gas and method therefore
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United States of America Patent
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Oct 29, 1996
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N/A
app pub date -
Sep 20, 1994
filing date -
Dec 3, 1991
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Abstract
An apparatus which mounts a sample in a vacuum chamber, heats the sample, and analyzes the gas generated from the sample. A loading lock mechanism, enables the vacuum chamber to be maintained at a vacuum even when a measurement is not conducted, and even when a sample is introduced/discharged in/from the chamber, thereby minimizing the background noises and increasing detection performance.
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