Interference enhanced optical sensor for detecting chemical species
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United States of America Patent
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Oct 8, 1996
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app pub date -
Jun 6, 1995
filing date -
Nov 17, 1992
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Abstract
An optical sensor for detecting gaseous or liquid chemical species including a sensing element having a flat light reflecting substrate and one or more transparent thin films which are organic or inorganic films or high-polymer films and are formed on the substrate. The detection of the gaseous or liquid chemical species is effected by measuring a change in the light reflection characteristic of the sensing element based on swelling of the thin film or a change in its thickness or refractive index or changes in both parameters.
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