Non-contact resistivity measurement apparatus and method using femtosecond laser pulses to create an electron flow

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United States of America Patent

PATENT NO 5563508
SERIAL NO

08414539

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Abstract

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Apparatus and method for measuring the resistivity of a material without contacting or damaging the material, using a current and voltage meter connected to a first probe and a second probe. The probes are placed adjacent the material and in spaced relation to the material, a first ultraviolet laser beam having femtosecond pulses is focused onto the first probe such that the first probe emits electrons toward the material, and a second ultraviolet laser beam having femtosecond pulses is focused onto the material such that the material emits electrons toward the second probe. A voltage and a closed current loop are thus created. The current and voltage meter measures the current and voltage to obtain current and voltage readings, and the current and voltage readings are used to determine the resistivity of the material.

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Patent Owner(s)

Patent OwnerAddress
PANASONIC TECHNOLOGIES INC150 MEADOWLAND PARKWAY THIRD FLOOR SECAUCUS NJ 07094

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tatah, Abdelkrim Arlington, MA 14 441

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