Method of making high oxygen chromium target
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United States of America Patent
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Oct 1, 1996
Issued Date -
N/A
app pub date -
Nov 21, 1994
filing date -
Mar 11, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
To provide a raw material for high oxygen chromium targets containing oxygen in a form capable of effectively preventing the dust ejection phenomenon. A raw material for high oxygen chromium targets comprising chromium crystalline particles dispersed in metallic chromium wherein at least a portion of the surface of all the crystals constituting the oxide crystalline particles is in contact with the matrix of the metallic chromium. A method of producing a raw material for high oxygen chromium targets comprising chromium oxide crystalline particles dispersed in metallic chromium characterized by heat-treating metallic chromium containing a solid solution of oxygen or oxide particles as a starting material, and precipitating or crystal-growing the oxygen or oxide particles as chromium oxide crystalline particles having a particle size of 0.1 to 100 .mu.m, thereby obtaining a raw material for chromium targets.
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