Multiple window electron gun providing redundant scan paths for an electron beam
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United States of America Patent
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Sep 17, 1996
Grant Date -
N/A
app pub date -
Jul 22, 1994
filing date -
Jul 22, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electron beam device having a plurality of individual, electron permeable, gas impermeable windows can produce a broad beam of free electrons. A multiplicity of windows allows each of the windows to be stronger, yet thinner, for greater electron permeability and durability. Having multiple windows also allows each window to be formed as a single crystal film, which can have superior strength and electron permeability, and which is difficult to form in a large area and easy to damage when so formed. In addition, having multiple windows allows a window end of the device and the beam which exits from that end to have configurations not easily achieved with a single window. Should a pinhole develop in one of the windows, it may be possible to seal the pinhole and re-evacuate the device, thereby extending the lifetime of the device. A current monitor is used to determine whether the electron beam passes through the windows or is absorbed in a surrounding face plate. A microprocessor controls the intensity and direction of the beam, in combination with feedback from the current monitor, to direct the beam through the windows in a sequence.
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