Field emission cathode including cylindrically shaped resistive connector and method of manufacturing
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United States of America Patent
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Sep 17, 1996
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N/A
app pub date -
Dec 28, 1994
filing date -
Dec 28, 1993
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Abstract
A high resistance epitaxial layer is formed on a substrate, and a resistance layer is formed for each emitter by injecting ions into the high resistance epitaxial layer via an aperture formed through a gate electrode. An emitter is provided on the resistance layer. Alternatively, ions are injected into a semiconductor substrate of a first conductivity type to provide a region of a second conductivity type opposite to the first conductivity type in the semiconductor substrate by using a gate electrode having an aperture as a mask. An emitter is provided on the region of the semiconductor substrate.
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