Method of stripping photoresist with composition containing inhibitor

United States of America Patent

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Sep 17, 1996
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N/A
app pub date
Jul 11, 1995
filing date
Jan 25, 1991

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Expired

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Abstract

Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

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Patent Owner	Address
AIR PRODUCTS AND CHEMICALS INC	1940 AIR PRODUCTS BOULEVARD PATENT DEPT ALLENTOWN PA 18106-5500

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Inventor Name	Address	# of filed Patents	Total Citations
Michelotti, Francis W	Easton, PA	9	312
Ward, Irl E	Bethlehem, PA	42	1072

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Method of stripping photoresist with composition containing inhibitor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

08501206

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PATENT NO	5556482
SERIAL NO	08501206
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08501206

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