Method of making an acceleration sensor
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United States of America Patent
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-
Aug 20, 1996
Issued Date -
N/A
app pub date -
Apr 25, 1995
filing date -
Dec 17, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor type acceleration sensor comprises a flexible printed circuit board on which a semiconductor type detector chip section is mounted. The detector chip is formed with openings therethrough overlapping an opening formed in a rear-side base plate of the flexible printed circuit board such that the detector chip section is supported only by a bridge portion. In case of excess input in an acceleration direction, elastic deformation of the bridge portion and a bending portion of the flexible printed circuit board provide absorption of the excess input for protecting the detector chip section.
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