Beam charge exchanging apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5543615
SERIAL NO

08371775

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A beam charge exchanging apparatus causes the charges of charged particles in a fast particle beam to be exchanged with charges of a gas or other fluid. The apparatus includes; a gas/fluid container disposed in a vacuum and having holes which allow the fast particle beam to pass through the container, a source of gas or other fluid, and a nozzle for introducing the gas into the container. The source and the nozzle are designed to introduce a high speed gas/fluid into the container so that the fast particle beam will collide with the high speed gas/fluid in the container and the charges thereof will be exchanged such that the fast particle beam is converted into a neutral particle beam. The apparatus may further include elements for detecting the quantity of neutral particles resulting from the charge exchange by measuring the quantity of generated ionized gas as an electric current.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatakeyama, Masahiro Kanagawa-ken, JP 112 2190
Saito, Mutsumi Kanagawa-ken, JP 45 1242
Yahiro, Tomoyuki Kanagawa-ken, JP 3 49

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