Compact, high resolution optical displacement detector
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United States of America Patent
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Jul 23, 1996
Grant Date -
N/A
app pub date -
Aug 11, 1992
filing date -
Aug 14, 1991
priority date (Note) -
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Abstract
The optical displacement detecting device utilizes an encoder plate 2 mounted displaceably along a given first plane and having thereon a periodic slit pattern 1. A light source 4 is disposed behind the encoder plate 2 to illuminate the slit pattern 1 to form a primary fringe image 3 shifting along the first plane. A lens member 6 is utilized to project the primary fringe image 3 by a given magnification to form a secondary enlarged fringe image 5 shifting along a given second plane. A light receiving unit 8 is fixed in the secondary plane to optically detect the shifting secondary enlarged fringe image 5 through a periodic mask pattern to thereby output an electric signal 7 indicative of a displacement of the encoder plate 2.
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