Active yoke hidden hinge digital micromirror device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5535047
SERIAL NO

08424021

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A spatial light modulator (10) of the DMD type having increased performance parameters. A pixel mirror (30) is supported by a yoke (32), whereby electrostatic attraction forces (70, 76, 80, 82) are generated between several structures. First, between the elevated mirror (30) and an elevated address electrode (50, 52). Second, between the yoke (32) and an underlying address electrode (26, 28). The pixel (30) achieves high address torque, high latching torques, high reset forces, and greater address margins over previous generation devices. The proximity of the yoke (32) over the substrate address electrodes (26, 28) realizes large attraction forces whereby the pixel is less susceptible to address upset, requires lower reset voltages and provides higher switching speeds.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hornbeck, Larry J Van Alstyne, TX 35 12515

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  • 503 Citation Count
  • G02B Class
  • 99.20 % this patent is cited more than
  • 29 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges11294155714020141042501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 90100 +020406080100120140160180200220240260280300320

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