Testing of recessed surfaces at grazing incidence
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United States of America Patent
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Jul 2, 1996
Grant Date -
N/A
app pub date -
Mar 16, 1995
filing date -
Mar 16, 1995
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An interferometer (10) includes a prism extender (50) appended to a prism (32) for directing a beam of light (42) into a recess (44) of a test piece (34). A first portion (42a) of the beam (42) refracts from a reference surface (54) of the prism extender (50) to an angle (.alpha.) of grazing incidence on a bottom surface (46) of the recess (44), and a second portion (42b) of the beam (42) reflects from the reference surface (54). The two portions (42 aand 42b) of the beam (42) recombine at the reference surface (54) forming an interference pattern indicative of differences between the reference surface (54) and the bottom surface (46) of the recess (44).
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