Scanning electron microscope and image forming method therewith
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United States of America Patent
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Jun 4, 1996
Grant Date -
N/A
app pub date -
Oct 28, 1994
filing date -
Nov 4, 1993
priority date (Note) -
Expired
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Abstract
In an electron microscope for observing an image of a sample using secondary electrons emitted from the sample by two-dimensionally scanning an electron beam on the sample, a low magnification and wide view image of the sample is formed on one frame memory. The frame memory for storing on picture of the image is divided into an appropriate number of areas. The image data of the sample, obtained by consecutively moving the sample to the sample areas, is stored to the corresponding areas of the frame memory.
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