Process for producing synthetic quartz glass powder
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United States of America Patent
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May 14, 1996
Grant Date -
N/A
app pub date -
Jun 14, 1994
filing date -
Jun 15, 1993
priority date (Note) -
Expired
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Abstract
Synthetic quartz glass powder is produced by (a) hydrolyzing an alkoxysilane to form a gel, (b) finely dividing the gel and then drying, or drying the gel and then finely dividing, and (c) calcining the obtained powder, the powder being maintained under an atmosphere with an oxygen concentration of not less than 30 vol % during at least a part of the calcining period at a temperature of not lower than 1,000.degree. C.
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