Electron beam radiator with cold cathode integral with focusing grid member and process of fabrication thereof

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United States of America Patent

PATENT NO 5514847
SERIAL NO

08185386

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Abstract

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A first laminated sub-structure having a semiconductor substrate, a lower insulating layer on the semiconductor substrate, emitter electrodes formed in micro-apertures in the lower insulating layer and a gate electrode on the upper surface of the lower insulating layer is aligned with a second laminated sub-structure having a transparent upper insulating layer and a grid member on the transparent upper insulating layer by means of a stepper, and the first and second laminated sub-structures are fixed to each other through a field assisted glass-metal sealing technique.

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Patent Owner(s)

Patent OwnerAddress
NEC MICROWAVE TUBE LTDKANAGAWA-KEN 229-1134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Makishima, Hideo Tokyo, JP 31 309
Tomihari, Yoshinori Tokyo, JP 22 252
Yamada, Keizo Tokyo, JP 66 1065

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