Optical integrated lens/grating coupling device
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United States of America Patent
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Apr 30, 1996
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N/A
app pub date -
Aug 22, 1994
filing date -
Oct 27, 1988
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Abstract
An optical device manufacturing method includes a step of accumulating an optical device inorganic material on a stamper by use of a vacuum thin-film growing method, and a step of removing the accumulated material from the stamper, thereby producing an optical device.
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