Micromotion stage
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United States of America Patent
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-
Apr 30, 1996
Issued Date -
N/A
app pub date -
Feb 16, 1995
filing date -
Jul 15, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromotion stage comprises a stationary plate and a moving plate connected by six links each consisting of a stacked piezoelectric element serving as an actuator, a holder fixed at one end of the stacked piezoelectric element, a capacitance type displacement gage retained by the holder and a target member fixed at the other end of the stacked piezoelectric element to have a part thereof face a tip portion of the capacitance type displacement gage across a small gap. Change in the distance between the holder and the target member caused by expansion or contraction of the stacked piezoelectric element and indicative of a change in the link stroke can be detected by the capacitance type displacement gage.
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