Process gas distribution system and method with automatic transducer zero calibration
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United States of America Patent
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Apr 16, 1996
Issued Date -
N/A
app pub date -
May 13, 1994
filing date -
Aug 31, 1990
priority date (Note) -
Expired
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Abstract
A system including a plurality of gas flow control units in cabinets which are connected to distribute process gas, on demand, to a plurality of utilization locations known as 'tool' locations in a semi-conductor manufacturing plant. Transducers are used in the system to measure pressures and other control parameters. Zero calibration of the transducers is provided by automatically subjecting each transducer to a reference computer routine to compute the difference between the standard value and the transducer output, and store the difference as an 'offset' to correct the output of the transducer. Thus, re-calibration is performed simply and quickly, at a relatively low labor cost and with relatively little downtime for the system.
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