Apparatus for measuring ions in a clean room gas flow using a spherical electrode
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United States of America Patent
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Apr 9, 1996
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N/A
app pub date -
Sep 17, 1993
filing date -
Sep 18, 1992
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Abstract
An apparatus for measuring ions in a gas which has a sensor around which the gas flows, the ions giving off their charge and giving rise to a current. The sensor is constructed as an electrode with a flow-favorable shape, such as a sphere. A fixed voltage is impressed on the electrode and the current produced at the electrode is measured, evaluated in a circuit and constitutes a measure for the ion count.
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