Charged-particle analyzer
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United States of America Patent
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Apr 9, 1996
Grant Date -
N/A
app pub date -
Mar 25, 1994
filing date -
Mar 26, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention provides apparatus and methods for investigating a small selected area of the surface of a specimen. The specimen is irradiated by a primary beam of X-rays or electrons to cause it to emit electrons. These are collected by a novel electron-optical arrangement and are used to create an image of the selected area of the surface using only those electrons emitted with energies lying in a specified range. Apparatus according to the invention has greater sensitivity and spatial resolution than previously known apparatus.
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