Directional atomic force microscope and method of observing a sample with the microscope

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United States of America Patent

SERIAL NO

08338179

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Abstract

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An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.

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Patent Owner(s)

  • AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;MINISTRY OF INTERNATIONAL TRADE & INDUSTRY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamanaka, Kazushi Tsukuba, JP 28 299

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