Pneumatically driven micro-pump
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United States of America Patent
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-
Mar 19, 1996
Grant Date -
N/A
app pub date -
Nov 17, 1994
filing date -
Nov 17, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-pump is disclosed for pneumatically causing a bulging/retracting motion of a plurality of micro-diaphragms disposed in an array along a channel through which a fluid is being driven. The pump includes channel means (10) including a first port (11), a second port (12) and a flow-through space (13) providing a communication therebetween; a plurality of diaphragms (21a-21e) disposed in an array along the flow-through space (13); diaphragm support means (20) including a plurality of actuating gas spaces (22a-22e) which opposes the rear surfaces of the respective diaphragms; a plurality of reciprocatory motion means for individually imparting an oscillation of pneumatic pressure to the respective actuating gas spaces (22a-22e), and drive means for driving the reciprocatory motion means for driving motion with phase differences therebetween so that the upper dead center shifts in the direction of the array.
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