Heating device used for a gas phase growing mechanism or heat treatment mechanism
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United States of America Patent
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Mar 12, 1996
Grant Date -
N/A
app pub date -
Jan 19, 1995
filing date -
Jun 16, 1994
priority date (Note) -
Expired
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Abstract
A heating device used for a gas phase growing mechanism or a heat treatment mechanism comprising a tubular reactor made of a heat resistant and chemically inert material incorporating a support having a plurality of works set and arranged thereon to be put to gas phase growing or heat treatment, a cylindrical main heating furnace body disposed so as to surround the outer circumferential surface of the tubular reactor 1 at the entire length thereof, and a pair of auxiliary heating furnace bodies each closing both longitudinal opening ends of the cylindrical main heating body, whereby the cylindrical main heating furnace body and the pair of auxiliary heating furnace bodies constitute a heating furnace for confining the tubular reactor therein.
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