Method of mounting an optical element

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5488514
SERIAL NO

08404924

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A mounting seat for an optical element is decoupled from a surrounding annulus that fixes the mount in place in an optical system. The annulus can be one of a plurality of annuli that are interconnected to surround and enclose a coaxial array of optical elements. The decoupling is accomplished by three flexible fingers extending inward from the annulus to a seat for the optical element, which can be mounted either directly on the flexible fingers or on a concentric seating ring supported by the fingers. The flexible elements can be formed integrally with an annulus by cutting slots in its inner perimeter. The flexible elements are structured relative to the lens elements they support so that natural frequencies of vibration of the lens elements are higher than the frequencies of external vibration. The decoupling provided by the flexible fingers absorbs a substantial portion of whatever deforming strain occurs in holding the annulus in place so that such strain does not deform the optical surface of the mounted element.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ULTRATECH STEPPER EAST INC7 STATTUCK ROAD ANDOVER MA 01801
ULTRATECH STEPPER INC3230 SCOTT BOULEVARD SANTA CLARA CA 95052-8103

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bruning, John H Pittsford, NY 30 732
DeWitt, Frank A Holcomb, NY 2 80
Hanford, Keith E Macedon, NY 8 163

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation