Flexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5486917
SERIAL NO

08201757

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A multiplicity of one-piece flexure plates are assembled in pairs to provide a support system on which a retroreflector may be mounted for reciprocal motion. Combined with balance bodies, the flexure plates provide a support system having portions that are dynamically and statically balanced with one another, irrespective of orientation, so as to thereby immunize the unit against extraneous forces. The motion transfer assembly is especially adapted for use to support a moving retroreflector in a two-arm interferometer that may further include a beamsplitter assembly constructed from a one-piece, integrally formed body, the body having convergent, optically flat planar surfaces of specular reflectance, and means for adjustably mounting a beamsplitter therein. The spectrometer is of modular construction, and employs an integrated clocking sub-assembly as well as a light-weight voice-coil motor.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carangelo, Robert M Glastonbury, CT 23 278
Dettori, Mark D Farmington, CT 1 31
Grigely, Lawrence J South Windsor, CT 1 31
Murray, Terence C Winchester, MA 1 31
Solomon, Peter R West Hartford, CT 28 732
Van, Dine C Peter Bolton, CT 1 31
Wright, David D Vershire, VT 34 885

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